%0 Journal Article
%@nexthigherunit 8JMKD3MGPCW/3ET2RFS
%@resumeid
%@resumeid 8JMKD3MGP5W/3C9JHSB
%X Hollow cathode discharges were evaluated under the effects of the E × B crossed fields for deposition of DLC (Diamond-like Carbon) films. The stabilities of various plasma discharges, as well as, the produced plasma confinement were enhanced significantly with the magnetic field application. Experimental tests corroborate the positive action of E × B mechanism for the improvement of PIII&D (Plasma Immersion Ion Implantation and Deposition) in metal tubes. As regards to the structure of the obtained carbon films, the magnetic field application improves their diamond-like character. Magnetically confined plasmas resulted in DLC films with defectfree morphology and lower roughness. Using this type of PIII&D setup is highly recommended for inner surface coating of tubes when highly disordered DLC films are required.
%9 journal article
%T Hollow cathode effects observed in magnetically confined plasmas used for deposition of DLC films via PIII&D in tubes
%@electronicmailaddress samantha.magalhaes@inpe.br
%@electronicmailaddress mario.ueda@inpe.br
%K PIII&D ,Hollow cathode discharges, DLC films, Magnetic field.
%@secondarytype PRE PI
%@archivingpolicy denypublisher denyfinaldraft24
%@usergroup simone
%@group LABAP-COCTE-INPE-MCTIC-GOV-BR
%@group LABAP-COCTE-INPE-MCTIC-GOV-BR
%3 mariano-how.pdf
%@secondarymark A1_INTERDISCIPLINAR A1_ENGENHARIAS_II A1_ENGENHARIAS_I A2_SAÚDE_COLETIVA A2_MATERIAIS A2_ENGENHARIAS_III A2_CIÊNCIAS_AGRÁRIAS_I B1_QUÍMICA B1_ODONTOLOGIA B1_MEDICINA_III B1_MEDICINA_II B1_MATEMÁTICA_/_PROBABILIDADE_E_ESTATÍSTICA B1_GEOCIÊNCIAS B1_FARMÁCIA B1_ENGENHARIAS_IV B1_CIÊNCIAS_BIOLÓGICAS_I B1_BIOTECNOLOGIA B2_ENSINO B2_CIÊNCIAS_BIOLÓGICAS_II B2_ASTRONOMIA_/_FÍSICA C_BIODIVERSIDADE
%@issn 0169-4332
%2 sid.inpe.br/mtc-m21c/2018/10.25.12.20.26
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Applied Surface Science
%@versiontype publisher
%P 824-832
%4 sid.inpe.br/mtc-m21c/2018/10.25.12.20
%@documentstage not transferred
%D 2019
%V 465
%@doi 10.1016/j.apsusc.2018.09.190
%A Mariano, Samantha de Fátima Magalhães,
%A Ueda, Mário,
%@dissemination WEBSCI; PORTALCAPES; COMPENDEX.
%@area FISPLASMA
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}