%0 Journal Article
%@nexthigherunit 8JMKD3MGPCW/3ESR3H2
%@nexthigherunit 8JMKD3MGPCW/3F358GL
%@nexthigherunit 8JMKD3MGPCW/444BQ9E
%X In this study, the pulsed-DC PECVD deposition system was used to produce Diamond-like carbon (DLC) film on the internal surface of a long metal tube (200 cm in length and 10 cm in diameter) employed as the deposition chamber itself. Firstly, the features of plasma discharges and the temperature distribution along the tube external surface were studied using argon, silane, and acetylene. The experimental results demonstrate that a stable discharge can be established inside the tube. It was found that when the precursor gas is employed, a temperature gradient on the tube surface is formed. Secondly, PECVD experiments regarding DLC film deposition inside the inner surface of the tube are described. For this purpose, polished stainless steel and silicon wafer samples were mounted on the inside tube surface for subsequent analysis of the coatings. It was found that the growth rate and the structure properties of the DLC film varied along the axial direction of the tube. However, surfaces of DLC film with high sp3 content provided better tribological characteristics. These results were mainly attributed to complex processes of local dissociation and activation happened by collision between the electrons and neutrals.
%8 Feb.
%9 journal article
%T DLC deposition inside of a long tube by using the pulsed-DC PECVD process
%@electronicmailaddress elver.mitma@inpe.br
%@electronicmailaddress
%@electronicmailaddress
%@electronicmailaddress carolina.lugo@inpe.br
%@electronicmailaddress vladimir.airoldi@inpe.br
%K Electric discharge, DLC, PECVD, Coating inside of the tube, Temperature.
%@secondarytype PRE PI
%@archivingpolicy denypublisher denyfinaldraft24
%@usergroup simone
%@group CMS-ETES-SESPG-INPE-MCTIC-GOV-BR
%@group CMS-ETES-SESPG-INPE-MCTIC-GOV-BR
%@group
%@group COLIT-COLIT-INPE-MCTIC-GOV-BR
%@group LABAS-COCTE-INPE-MCTIC-GOV-BR
%3 pillaca_dlc.pdf
%@secondarymark A1_MATERIAIS A1_ENGENHARIAS_II A2_SAÚDE_COLETIVA A2_INTERDISCIPLINAR A2_GEOCIÊNCIAS A2_ENGENHARIAS_III B1_ODONTOLOGIA B1_MEDICINA_II B1_ENGENHARIAS_IV B1_ASTRONOMIA_/_FÍSICA B2_QUÍMICA B2_CIÊNCIAS_BIOLÓGICAS_I
%@issn 0257-8972
%2 sid.inpe.br/mtc-m21c/2019/01.02.17.42.17
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Universidad Nacional de Colombia
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%B Surface and Coatings Technology
%@versiontype publisher
%P 55-61
%4 sid.inpe.br/mtc-m21c/2019/01.02.17.42
%@documentstage not transferred
%D 2019
%V 359
%@doi 10.1016/j.surfcoat.2018.12.011
%A Pillaca, Elver Juan de Dios Mitma,
%A Ramírez Ramos, Marco Antonio,
%A Gutierrez Bernal, Jesús Manuel,
%A Lugo González, Dubrazkha Carolina,
%A Trava-Airoldi, Vladimir Jesus,
%@dissemination WEBSCI; PORTALCAPES; COMPENDEX.
%@area FISMAT
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}