%0 Journal Article
%@nexthigherunit 8JMKD3MGPCW/3ET2RFS
%3 Oliveira_enhancement.pdf
%4 sid.inpe.br/mtc-m21c/2019/02.07.15.03
%8 Apr.
%9 journal article
%@issn 1369-8001
%A Oliveira, Rogério de Moraes,
%A Vieira, Maxton S.,
%A Silva, Matheus M. N. F.,
%@secondarytype PRE PI
%B Materials Science in Semiconductor Processing
%D 2019
%K ZnO-based gas sensor, Plasma immersion ion implantation, Fast time response, High sensitivity, Low working temperature.
%P 339-344
%@secondarymark A2_ENGENHARIAS_IV B5_ASTRONOMIA_/_FÍSICA
%T Enhancement of acetylene gas sensing properties for a ZnO-based gas sensorproduced by plasma immersion ion implantation and deposition
%V 93
%X Zinc oxide (ZnO) based gas sensors with sensitivities reaching 90% and time responses as low as two seconds foracetylene sensing (1 vol%), were produced by means of plasma immersion ion implantation and deposition (PIII&D). In the process, after the generation of an argon glow discharge, metallic zinc is vaporized, partially ionizedand implanted/deposited into/onto silicon substrates without the aid of catalysts or buffer layers. Calcination isperformed after treatment in atmospheric pressure at 500 °C, for 10 h, leading to the achievement of poly-crystalline ZnO nanostructures. The resistance change of the sensor was monitored by varying the respectiveworking temperature from 140 °C up to 280 °C for three different acetylene concentrations (1, 2, 3 vol%). Besidesthe high sensitivity and the fast response time, the recovery time was also measured and the repeatability of thesensor was tested by feeding and cutting the working gas supply into the measuring system at regular timeintervals.
%@area FISPLASMA
%@electronicmailaddress rogerio.oliveira@inpe.br
%@documentstage not transferred
%@group LABAP-COCTE-INPE-MCTIC-GOV-BR
%@usergroup simone
%@resumeid 8JMKD3MGP5W/3C9JJ6L
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Federal da Bahia (IFBA)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@versiontype publisher
%@holdercode {isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}
%@doi 10.1016/j.mssp.2018.12.031
%2 sid.inpe.br/mtc-m21c/2019/02.07.15.03.29